SL

Shihying Lee

ET Ekc Technology: 5 patents #6 of 87Top 7%
Overall (All Time): #1,026,754 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7479474 Reducing oxide loss when using fluoride chemistries to remove post-etch residues in semiconductor processing Mihaela Cernat 2009-01-20
7157415 Post etch cleaning composition for dual damascene system Catherine M. Peyne, David J. Maloney, Wai Mun Lee, Leslie W. Arkless 2007-01-02
7144848 Cleaning compositions containing hydroxylamine derivatives and processes using same for residue removal De-Ling Zhou, Jing Qiao, Bakul Patel, Becky Min Hon 2006-12-05
7135445 Process for the use of bis-choline and tris-choline in the cleaning of quartz-coated polysilicon and other materials Richard W. Charm, De-Ling Zhou, Robert J. Small 2006-11-14
6417112 Post etch cleaning composition and process for dual damascene system Catherine M. Peyne, David J. Maloney, Wai Mun Lee, Leslie W. Arkless 2002-07-09