Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7479474 | Reducing oxide loss when using fluoride chemistries to remove post-etch residues in semiconductor processing | Shihying Lee | 2009-01-20 |
| 7273060 | Methods for chemically treating a substrate using foam technology | Bakul Patel, Robert J. Small | 2007-09-25 |