Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7479395 | Method of monitoring a production process using a linear combination of measured variables with selected weights | Dirk Knobloch, Knut Voigtländer, Jan Zimpel | 2009-01-20 |
| 6643559 | Method for monitoring a semiconductor fabrication process for processing a substrate | — | 2003-11-04 |