| 7528098 |
Semiconductor process residue removal composition and process |
Wai Mun Lee, Katy Ip, Xuan-Dung Dinh |
2009-05-05 |
| 7314823 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, Maria Peterson |
2008-01-01 |
| 7276180 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, Maria Peterson |
2007-10-02 |
| 7157415 |
Post etch cleaning composition for dual damascene system |
Catherine M. Peyne, Shihying Lee, Wai Mun Lee, Leslie W. Arkless |
2007-01-02 |
| 7074640 |
Method of making barrier layers |
Wai Mun Lee, Paul Roman, Michael Fury |
2006-07-11 |
| 7033942 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, Maria Peterson |
2006-04-25 |
| 6825156 |
Semiconductor process residue removal composition and process |
Wai Mun Lee, Katy Ip, Xuan-Dung Dinh |
2004-11-30 |
| 6696363 |
Method of and apparatus for substrate pre-treatment |
Wai Mun Lee, Paul Roman, Michael Fury, Ross Hill, Clifford Henderson +1 more |
2004-02-24 |
| 6635186 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, Maria Peterson |
2003-10-21 |
| 6566276 |
Method of making electronic materials |
Wai Mun Lee, Paul Roman, Michael Fury, Ross Hill |
2003-05-20 |
| 6417112 |
Post etch cleaning composition and process for dual damascene system |
Catherine M. Peyne, Shihying Lee, Wai Mun Lee, Leslie W. Arkless |
2002-07-09 |
| 6313039 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, Maria Peterson |
2001-11-06 |
| 6117783 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, Maria Peterson |
2000-09-12 |