Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7528098 | Semiconductor process residue removal composition and process | Wai Mun Lee, Katy Ip, Xuan-Dung Dinh | 2009-05-05 |
| 7314823 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, Maria Peterson | 2008-01-01 |
| 7276180 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, Maria Peterson | 2007-10-02 |
| 7157415 | Post etch cleaning composition for dual damascene system | Catherine M. Peyne, Shihying Lee, Wai Mun Lee, Leslie W. Arkless | 2007-01-02 |
| 7074640 | Method of making barrier layers | Wai Mun Lee, Paul Roman, Michael Fury | 2006-07-11 |
| 7033942 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, Maria Peterson | 2006-04-25 |
| 6825156 | Semiconductor process residue removal composition and process | Wai Mun Lee, Katy Ip, Xuan-Dung Dinh | 2004-11-30 |
| 6696363 | Method of and apparatus for substrate pre-treatment | Wai Mun Lee, Paul Roman, Michael Fury, Ross Hill, Clifford Henderson +1 more | 2004-02-24 |
| 6635186 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, Maria Peterson | 2003-10-21 |
| 6566276 | Method of making electronic materials | Wai Mun Lee, Paul Roman, Michael Fury, Ross Hill | 2003-05-20 |
| 6417112 | Post etch cleaning composition and process for dual damascene system | Catherine M. Peyne, Shihying Lee, Wai Mun Lee, Leslie W. Arkless | 2002-07-09 |
| 6313039 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, Maria Peterson | 2001-11-06 |
| 6117783 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, Maria Peterson | 2000-09-12 |