| 7314823 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, David J. Maloney |
2008-01-01 |
| 7276180 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, David J. Maloney |
2007-10-02 |
| 7033409 |
Compositions for chemical mechanical planarization of tantalum and tantalum nitride |
Robert J. Small, Tuan Truong, Melvin Keith Carter, Lily Yao |
2006-04-25 |
| 7033942 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, David J. Maloney |
2006-04-25 |
| 6866792 |
Compositions for chemical mechanical planarization of copper |
Robert J. Small, Tuan Truong, Melvin Keith Carter, Lily Yao |
2005-03-15 |
| 6638326 |
Compositions for chemical mechanical planarization of tantalum and tantalum nitride |
Robert J. Small, Tuan Truong, Melvin Keith Carter, Lily Yao |
2003-10-28 |
| 6635186 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, David J. Maloney |
2003-10-21 |
| 6313039 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, David J. Maloney |
2001-11-06 |
| 6251150 |
Slurry composition and method of chemical mechanical polishing using same |
Robert J. Small, Tuan Troung, Lionel Bonneau, Jean Claude Drouget |
2001-06-26 |
| 6117783 |
Chemical mechanical polishing composition and process |
Robert J. Small, Laurence McGhee, David J. Maloney |
2000-09-12 |