SB

Subramanian Balakumar

CM Chartered Semiconductor Manufacturing: 7 patents #90 of 840Top 15%
Overall (All Time): #755,637 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7095073 High K artificial lattices for capacitor applications to use in Cu or Al BEOL Chew Hoe Ang, Jia Zhen Zheng, Paul Proctor 2006-08-22
6830971 High K artificial lattices for capacitor applications to use in CU or AL BEOL Chew Hoe Ang, Jia Zhen Zheng, Paul Proctor 2004-12-14
6726545 Linear polishing for improving substrate uniformity Chen Feng, Victor Lim, Paul Proctor, Mukhopadhyay Madhusudan, Chivukula Subrahmanyam +1 more 2004-04-27
6663472 Multiple step CMP polishing Victor Lim, Chen Feng, Paul Proctor 2003-12-16
6649486 Method to form shallow trench isolations Kong Hean Lee, Zheng Zhou, Xian Bin Wang 2003-11-18
6569770 Method for improving oxide erosion of tungsten CMP operations Xian Bin Wang, Yi Xu, Cuiyang Wang 2003-05-27
6248006 CMP uniformity Madhusudan Mukhopadhyay, Chivukula Subrahmanyam, Yelehanka Ramachandramurthy Pradeep 2001-06-19