CS

Chivukula Subrahmanyam

CM Chartered Semiconductor Manufacturing: 7 patents #90 of 840Top 15%
📍 Singapore, SG: #1,210 of 13,971 inventorsTop 9%
Overall (All Time): #757,254 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
6726545 Linear polishing for improving substrate uniformity Subramanian Balakumar, Chen Feng, Victor Lim, Paul Proctor, Mukhopadhyay Madhusudan +1 more 2004-04-27
6689653 Method of preserving the top oxide of an ONO dielectric layer via use of a capping material Xavier Teo Leng Seah, Rajan Rajgopal 2004-02-10
6399448 Method for forming dual gate oxide Madhusudan Mukhopadhyay, Yelehanka Ramachandramurthy Pradeep 2002-06-04
6337262 Self aligned T-top gate process integration Yelehanka Ramachandramurthy Pradeep, Vijai Kumar Chhagan, Henry Gerung 2002-01-08
6284613 Method for forming a T-gate for better salicidation Yelehanka Ramachandramurthy Pradeep, Ramakrishnan Rajagopal 2001-09-04
6248006 CMP uniformity Madhusudan Mukhopadhyay, Subramanian Balakumar, Yelehanka Ramachandramurthy Pradeep 2001-06-19
5747369 Formation of a capacitor using a sacrificial etch stop Arjun Kumar Kantimahanti, Mei Sheng Zhou 1998-05-05