Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5610529 | Probe station having conductive coating added to thermal chuck insulator | — | 1997-03-11 |
| 5457398 | Wafer probe station having full guarding | Warren K. Harwood, Paul A. Tervo | 1995-10-10 |
| 5434512 | Wafer probe station having integrated guarding, Kelvin connection and shielding systems | Warren K. Harwood, Paul A. Tervo, Kenneth R. Smith, Richard H. Warner, Peter Andrews | 1995-07-18 |
| 5345170 | Wafer probe station having integrated guarding, Kelvin connection and shielding systems | Warren K. Harwood, Paul A. Tervo, Kenneth R. Smith, Richard H. Warner, Peter Andrews | 1994-09-06 |