Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8279402 | Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same | Stephan Six, Michael Lill, Ruediger Duesing, Bernhard Gellrich, Michael Widmann +2 more | 2012-10-02 |