Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2013-08-20 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz +11 more | 2009-02-03 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2007-12-04 |