Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9925696 | Irradiation and molding unit | Clemens Trumm, Holger Albrecht | 2018-03-27 |
| 9927714 | Projection exposure apparatus with at least one manipulator | Boris Bittner | 2018-03-27 |
| 9910364 | Projection exposure apparatus including at least one mirror | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer | 2018-03-06 |
| 9823578 | Control device for controlling at least one manipulator of a projection lens | — | 2017-11-21 |
| 9731435 | Integral irradiation unit | Clemens Trumm, Holger Albrecht | 2017-08-15 |