Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7231123 | Photonic crystal optical element and manufacturing method therefor | Toshihiko Ouchi, Takao Yonehara | 2007-06-12 |
| 7023522 | Multiple exposure method | Miyoko Kawashima | 2006-04-04 |
| 6946666 | Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same | Kenji Saito, Toshihiko Tsuji | 2005-09-20 |
| 6930754 | Multiple exposure method | Miyoko Kawashima | 2005-08-16 |
| 6839890 | Mask manufacturing method | Kenji Saitoh, Kenji Yamazoe | 2005-01-04 |
| 6816233 | Mask having pattern areas whose transmission factors are different from each other | — | 2004-11-09 |
| 6806477 | Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same | Kenji Saito, Toshihiko Tsuji | 2004-10-19 |
| 6670080 | Mask pattern creating method and mask pattern creating apparatus | Tetsunobu Kochi | 2003-12-30 |
| 6632574 | Mask having pattern areas whose transmission factors are different from each other | — | 2003-10-14 |
| 6534242 | Multiple exposure device formation | Akiyoshi Suzuki, Miyoko Kawashima, Kenji Saitoh, Yuichi Iwasaki | 2003-03-18 |
| 6437852 | Exposure system | — | 2002-08-20 |
| 6377337 | Projection exposure apparatus | Akiyoshi Suzuki | 2002-04-23 |
| 6344892 | Exposure apparatus and device manufacturing method using same | Akiyoshi Suzuki, Takahiro Matsumoto | 2002-02-05 |
| 6252662 | Projection exposure apparatus and device manufacturing method using the same | — | 2001-06-26 |
| 6061153 | Image processing apparatus and method | — | 2000-05-09 |
| 5915076 | Image processing apparatus and method | — | 1999-06-22 |