Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369486 | Position detector for detecting the position of an object using a diffraction grating positioned at an angle | Takahiro Matsumoto, Noriyuki Nose, Minoru Yoshii, Kenji Saitoh, Masanobu Hasegawa | 1994-11-29 |
| 5333050 | Measuring method and apparatus for meausring the positional relationship of first and second gratings | Noriyuki Nose, Kenji Saitoh, Minoru Yoshii | 1994-07-26 |
| 5321502 | Measuring method and measuring apparatus | Takahiro Matsumoto, Minoru Yoshii, Kenji Saito, Hiroyasu Nose, Seiji Takeuchi | 1994-06-14 |