Robert Vacassy — 9 Patents at Cabot Microelectronics

Robert Vacassy has been granted 9 US patents while listed as an inventor at Cabot Microelectronics. The first was granted in 2002 and the most recent in April 2018. Robert Vacassy ranks #535,341 of 4,157,543 US inventors in our database (top 12.9%). Patent records list Robert Vacassy in Aurora, IL, US.

Issued Patents All Time

Showing 1–9 of 9 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9951054	CMP porous pad with particles in a polymeric matrix	Shoutian Li, Jaishankar Kasthuri	2018-04-24	$16,303,000
9463551	Polishing pad with porous interface and solid core, and related apparatus and methods	George Fotou	2016-10-11	$19,350,000
9074118	CMP method for metal-containing substrates	Renjie Zhou	2015-07-07	$12,452,000
7677956	Compositions and methods for dielectric CMP	Phillip W. Carter, Gregory Bogush, Farhana Khan, Timothy Johns	2010-03-16	$6,761,000
7582127	Polishing composition for a tungsten-containing substrate	Dinesh N. Khanna, Alexander William Simpson	2009-09-01	$3,812,000
7294576	Tunable selectivity slurries in CMP applications	Zhan Chen, Benjamin Bayer, Dinesh N. Khanna	2007-11-13	$7,597,000
7247567	Method of polishing a tungsten-containing substrate	Dinesh N. Khanna, Alexander William Simpson	2007-07-24	$13,800,000
6682575	Methanol-containing silica-based CMP compositions	—	2004-01-27	$9,610,000
6458335	Production of powders	Jacques Lemaitre, Nathalie Jongen, Paul Bowen	2002-10-01

Robert Vacassy — 9 Patents

Issued Patents All Time

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