Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9687956 | Polishing pad with offset concentric grooving pattern and method for polishing a substrate therewith | Ching-Ming Tsai, Shi Cheng, Kun-Shu Yang, Jia-Cheng Hsu, Sheng-Huan Liu +1 more | 2017-06-27 |
| 6561880 | Apparatus and method for cleaning the polishing pad of a linear polisher | Tien-Chen Hu | 2003-05-13 |