Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9687956 | Polishing pad with offset concentric grooving pattern and method for polishing a substrate therewith | Ching-Ming Tsai, Shi Cheng, Kun-Shu Yang, Jia-Cheng Hsu, Feng-Chih Hsu +1 more | 2017-06-27 |
| 9409276 | CMP polishing pad having edge exclusion region of offset concentric groove pattern | Ching-Ming Tsai, Shi Cheng, Jia-Cheng Hsu, Kun-Shu Yang, Hui Feng Chen +1 more | 2016-08-09 |