Issued Patents All Time
Showing 51–75 of 122 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9097986 | Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method | Atsushi Ohta | 2015-08-04 |
| 9085758 | Method of culturing vascular smooth muscle cells, culture device and medical material obtained by the culture | Keiichi Miyamoto | 2015-07-21 |
| 9073346 | Method for thermal head energizing time control at astable voltage | Mariko Niizeki, Mohd Khairul Fatasha | 2015-07-07 |
| 9061858 | Tape cassette | Koshiro Yamaguchi, Yasuhiro Shibata, Minoru Yamamoto, Masato Kato, Nobuo Kato +4 more | 2015-06-23 |
| 9041906 | Immersion exposure apparatus and method that detects liquid adhered to rear surface of substrate | Hiroaki Takaiwa | 2015-05-26 |
| 9011075 | Substrate processing method | Hiromitsu Sakaue | 2015-04-21 |
| 8814489 | Substrate processing system and substrate processing method | Hiromitsu Sakaue | 2014-08-26 |
| 8770877 | Tape printer | Koshiro Yamaguchi, Tsuyoshi Nagae, Teruo Imamaki, Masato Kato, Akira Sago +2 more | 2014-07-08 |
| 8764326 | Tape cassette | Koshiro Yamaguchi, Akira Sago, Yasuhiro Iriyama, Yasuhiro Shibata, Tsuyoshi Nagae +2 more | 2014-07-01 |
| 8767168 | Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table after exposure | Hiroaki Takaiwa | 2014-07-01 |
| 8755025 | Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method | Nobuyoshi Tanno | 2014-06-17 |
| 8740482 | Tape printer | Koshiro Yamaguchi, Akira Sago, Tsutomu Kato, Teruo Imamaki, Yasuhiro Shibata +2 more | 2014-06-03 |
| 8651756 | Tape cassette | Koshiro Yamaguchi, Masato Kato, Tsuyoshi Nagae, Teruo Imamaki, Akira Sago +2 more | 2014-02-18 |
| 8562228 | Tape printer | Koshiro Yamaguchi, Tsuyoshi Nagae, Masato Kato, Teruo Imamaki, Akira Sago +2 more | 2013-10-22 |
| 8536862 | Apparatus and method of obtaining field by measurement | Kenjiro Kimura, Kei Kobayashi, Hirofumi Yamada, Kazumi Matsushige, Nobuo Satoh +1 more | 2013-09-17 |
| 8488101 | Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table on way from exposure position to unload position | Hiroaki Takaiwa | 2013-07-16 |
| 8382389 | Tape cassette | Koshiro Yamaguchi, Masato Kato, Tsuyoshi Nagae, Teruo Imamaki, Akira Sago +2 more | 2013-02-26 |
| 8345216 | Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method | Atsushi Ohta | 2013-01-01 |
| 8192099 | Print tape and a print cassette | Mariko Yamada, Tsutomu Kato, Tsuyoshi Nagae, Kiyoichi Ohta, Akira Ito +1 more | 2012-06-05 |
| 8125736 | Head suspension, load beam, and method of manufacturing load beam | Akira Nojima | 2012-02-28 |
| 8120879 | Head suspension, load beam, method of manufacturing load beam, and method of processing work | — | 2012-02-21 |
| 8107055 | Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method | Atsushi Ohta | 2012-01-31 |
| 8072708 | Head suspension, load beam, and method of manufacturing load beam | — | 2011-12-06 |
| 8016285 | Sheet package and printing unit | Yasunori Nakamura, Yoshikatsu Suito | 2011-09-13 |
| 7995186 | Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method | Atsushi Ohta | 2011-08-09 |