Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142506 | Substrate transfer apparatus, substrate processing system and substrate processing method | Toshiaki Kodama | 2024-11-12 |
| 11776828 | Vacuum processing device | — | 2023-10-03 |
| 10872797 | Substrate processing apparatus and method of operating substrate processing apparatus | Junpei SASAKI | 2020-12-22 |
| 10607878 | Transfer device and correction method | Seiji ISHIBASHI | 2020-03-31 |
| 10340175 | Substrate transfer teaching method and substrate processing system | — | 2019-07-02 |
| 10115611 | Substrate cooling method, substrate transfer method, and load-lock mechanism | Shinya Okano | 2018-10-30 |
| 9011075 | Substrate processing method | Takashi Horiuchi | 2015-04-21 |
| 8814489 | Substrate processing system and substrate processing method | Takashi Horiuchi | 2014-08-26 |
| 8545160 | Substrate transfer apparatus and substrate transfer method | Hirofumi Yamaguchi | 2013-10-01 |