Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872797 | Substrate processing apparatus and method of operating substrate processing apparatus | Hiromitsu Sakaue | 2020-12-22 |
| 8134788 | Hybrid optical element | Kenji Inoue | 2012-03-13 |