Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8755025 | Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method | Takashi Horiuchi | 2014-06-17 |
| 7898645 | Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method | Takashi Horiuchi | 2011-03-01 |
| 6432849 | Substrate storage cassette positioning device and method | Yutaka Endo | 2002-08-13 |