Issued Patents All Time
Showing 51–75 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9656386 | Coaxial drive vacuum robot | Robert T. Caveney | 2017-05-23 |
| 9601362 | High speed substrate aligner apparatus | Jairo T. Moura, Martin Hosek, Todd Bottomley | 2017-03-21 |
| 9401294 | Compact substrate transport system | Christopher Hofmeister, Alexander Krupyshev | 2016-07-26 |
| 9368382 | Elevator-based tool loading and buffering system | Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, William J. Fosnight | 2016-06-14 |
| 9248568 | Unequal link SCARA arm | Robert T. Caveney, David Martin | 2016-02-02 |
| 9230841 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura | 2016-01-05 |
| 9224628 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, William J. Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2015-12-29 |
| 9147590 | Dual scara arm | Antonio Pietrantonio, Anthony Chesna, Hakan Elmali | 2015-09-29 |
| 9024488 | Robot drive with magnetic spindle bearings | Martin Hosek, Jairo T. Moura, Jay Krishnasamy, Christopher Hofmeister | 2015-05-05 |
| 8918203 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura | 2014-12-23 |
| 8888433 | Reduced capacity carrier and method of use | William J. Fosnight, Christopher Hofmeister, Gerald M. Friedman, Michael L. Bufano | 2014-11-18 |
| 8678734 | Elevator-based tool loading and buffering system | Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, William J. Fosnight | 2014-03-25 |
| 8651796 | Substrate transport apparatus with multiple independently movable articulated arms | Martin Hosek | 2014-02-18 |
| 8573919 | Substrate transport apparatus | Christopher Hofmeister | 2013-11-05 |
| 8562271 | Compact substrate transport system | Christopher Hofmeister, Alexander Krupyshev | 2013-10-22 |
| 8545165 | High speed substrate aligner apparatus | Jairo T. Moura, Martin Hosek, Todd Bottomley | 2013-10-01 |
| 8454293 | Substrate loading and unloading station with buffer | David Beaulieu, Peter van der Meulen | 2013-06-04 |
| 8403619 | High speed substrate aligner apparatus | Jairo T. Moura, Martin Hosek, Todd Bottomley | 2013-03-26 |
| 8376685 | Dual scara arm | Antonio Pietrantonio, Anthony Chesna, Hakan Elmoli | 2013-02-19 |
| 8328495 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, William J. Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2012-12-11 |
| 8283813 | Robot drive with magnetic spindle bearings | Martin Hosek, Jairo T. Moura, Jay Krishnasamy, Christopher Hofmeister | 2012-10-09 |
| 8272827 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, William J. Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2012-09-25 |
| 8267634 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, William J. Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2012-09-18 |
| 7946800 | Substrate transport apparatus with multiple independently movable articulated arms | Martin Hosek | 2011-05-24 |
| 7925378 | Process apparatus with on-the-fly workpiece centering | Haniel Olivera, William J. Fosnight, Richard J. Pickreign, Robert T. Caveney | 2011-04-12 |