ES

Eason Yu-Shen Su

Basf Se: 3 patents #4,656 of 13,826Top 35%
Overall (All Time): #1,512,488 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9524874 Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films Shyam Sundar Venkataraman, Arend Jouke Kingma, Bastian Marten Noller 2016-12-20
9487675 Chemical mechanical polishing composition comprising polyvinyl phosphonic acid and its derivatives Vijay Immanuel Raman, Yuzhuo Li, Christian Schade, Shyam Sundar Venkataraman, Sheik Ansar Usman Ibrahim 2016-11-08
9157012 Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of borophosphosilicate glass (BPSG) material in the presence of a CMP composition comprising anionic phosphate or phosphonate Shyam Sundar Venkataraman 2015-10-13