Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834656 | Plasma process for removing polymer and residues from substrates | Han Qingyuan, Orlando Escorcia, Gary A. Dahrooge, Ivan L. Berry, III | 2004-12-28 |
| 6759098 | Plasma curing of MSQ-based porous low-k film materials | Qingyuan Han, Orlando Escorcia, Ralph Albano, Ivan L. Berry, III, Jeff Jang +1 more | 2004-07-06 |
| 6756085 | Ultraviolet curing processes for advanced low-k materials | Qingyuan Han, Orlando Escorcia, Ivan L. Berry, III | 2004-06-29 |
| 6630406 | Plasma ashing process | Ivan L. Berry, III, Orlando Escorcia, Qingyuan Han, Palani Sakthivel | 2003-10-07 |
| 6558755 | Plasma curing process for porous silica thin film | Ivan L. Berry, III, Todd Bridgewater, Wei Chen, Qingyuan Han, Eric Scott Moyer +1 more | 2003-05-06 |
| 6548416 | Plasma ashing process | Qingyuan Han, Ivan L. Berry, III, Palani Sakthivel | 2003-04-15 |
| 6184523 | High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use | Peter A. Dowben, Tara J. McAvoy, David N. McIlroy | 2001-02-06 |