Wei Chen — 1 Patent at Axcelis Technologies

Wei Chen has been granted 1 US patent while listed as an inventor at Axcelis Technologies. All of these patents were granted in 2003. Wei Chen ranks #2,406,284 of 4,157,543 US inventors in our database (top 57.9%). Patent records list Wei Chen in Midland, MI, US.

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Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6558755	Plasma curing process for porous silica thin film	Ivan L. Berry, III, Todd Bridgewater, Qingyuan Han, Eric Scott Moyer, Michael John Spaulding +1 more	2003-05-06

Wei Chen — 1 Patent

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