Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774868 | Image sensor for immersion lithography | Nirupam Banerjee, Johan Franciscus Maria Beckers, Peter Brakhage, Arend Johannes Donkerbroek, Daniel N. Grimm +2 more | 2023-10-03 |
| 10976196 | Sensor mark and a method of manufacturing a sensor mark | Joost André KLUGKIST, Vadim Yevgenyevich Banine, Johan Franciscus Maria Beckers, Madhusudhanan Jambunathan, Maxim Aleksandrovich Nasalevich +4 more | 2021-04-13 |