Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8094287 | Lithographic appararus and method | Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver, Bernhard Gellrich +1 more | 2012-01-10 |
| 7446849 | Lithographic apparatus and device manufacturing method | Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver, Bernard Gellrich +1 more | 2008-11-04 |