Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10588211 | Radiation source having debris control | Rolf Theodorus Nicolaas Beijsens, Kornelis Frits Feenstra, Arjen Teake De Jong, Reinier Theodorus Martinus Jilisen, Niek Antonius Jacobus Maria Kleemans +3 more | 2020-03-10 |
| 9476841 | High-brightness LPP EUV light source | Pavel Stanislavovich Antsiferov, Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich KRYVOKORYTOV +7 more | 2016-10-25 |