Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7239368 | Using unflatness information of the substrate table or mask table for decreasing overlay | Rene Oesterholt, Ralph Brinkhof, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier, Joost Jeroen Ottens +1 more | 2007-07-03 |