Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411424 | Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object | Remco VAN DE MEERENDONK, Daniel Jozef Maria Direcks, Günes NAKIBOGLU, Nicholas Peter Waterson, Joost André KLUGKIST +6 more | 2025-09-09 |
| 11681233 | Gas mixing for fast temperature control of a cooling hood | Joost DE HOOGH, Alain Louis Claude Leroux, Alexander Marinus Arnoldus Huijberts, Christiaan Louis Valentin, Robert Coenraad Wit +3 more | 2023-06-20 |