Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8477285 | Particle cleaning of optical elements for microlithography | Dirk Heinrich Ehm, Arnoldus Jan Storm, Johannes Hubertus Josephina Moors, Almut Czap, Mona Nagel +4 more | 2013-07-02 |