Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11397840 | Edge placement errors for optical lithography | — | 2022-07-26 |
| 10459345 | Focus-dose co-optimization based on overlapping process window | Stefan Hunsche, Marinus Jochemsen, Vito Tomasello | 2019-10-29 |
| 7569310 | Sub-resolution assist features for photolithography with trim ends | Charles H. Wallace | 2009-08-04 |