Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459345 | Focus-dose co-optimization based on overlapping process window | Stefan Hunsche, Chiou-hung Jang, Marinus Jochemsen | 2019-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459345 | Focus-dose co-optimization based on overlapping process window | Stefan Hunsche, Chiou-hung Jang, Marinus Jochemsen | 2019-10-29 |