Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8629973 | Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation | Richard Carl Zimmerman, Hendrikus Robertus Marie Van Greevenbroek, Peter Kochersperger, Todd R. Downey, Elizabeth Stone +2 more | 2014-01-14 |
| 6093520 | High aspect ratio microstructures and methods for manufacturing microstructures | Yuli Vladimirsky, Volker Saile | 2000-07-25 |