Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8647722 | Method of forming insulation film using plasma treatment cycles | Akiko Kobayashi, Akira Shimizu, Nobuyoshi Kobayashi, Atsuki Fukazawa | 2014-02-11 |
| 8415259 | Method of depositing dielectric film by modified PEALD method | Woo Jin Lee, Akira Shimizu, Daekyun Jeong | 2013-04-09 |
| 8394466 | Method of forming conformal film having si-N bonds on high-aspect ratio pattern | Akira Shimizu, Kunitoshi Namba, Woo Jin Lee | 2013-03-12 |
| 8334219 | Method of forming stress-tuned dielectric film having Si-N bonds by modified PEALD | Woo Jin Lee, Akira Shimuzu | 2012-12-18 |
| 8173554 | Method of depositing dielectric film having Si-N bonds by modified peald method | Woo Jin Lee, Akira Shimizu, Deakyun Jeong | 2012-05-08 |