Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8173554 | Method of depositing dielectric film having Si-N bonds by modified peald method | Woo Jin Lee, Kuo-wei Hong, Akira Shimizu | 2012-05-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8173554 | Method of depositing dielectric film having Si-N bonds by modified peald method | Woo Jin Lee, Kuo-wei Hong, Akira Shimizu | 2012-05-08 |