Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12107000 | Substrate support assembly and substrate processing device including the same | JaeMin Roh, GunYong Park | 2024-10-01 |
| 11993843 | Substrate processing apparatus | Seung Wook Kim, Won Ki Jeong, Dong Rak Jung, Hong Hyun Kim | 2024-05-28 |
| 11996304 | Substrate processing device | — | 2024-05-28 |
| 11664245 | Substrate processing device | — | 2023-05-30 |
| 11443926 | Substrate processing apparatus | WonKi Jeong, HaSeok Jang | 2022-09-13 |
| 11430640 | Substrate processing apparatus | WonKi Jeong, HaSeok Jang | 2022-08-30 |
| 11401605 | Substrate processing apparatus | JaeMin Roh | 2022-08-02 |