Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406873 | Lift pin assembly | DaeYoun Kim, DongJun Park | 2025-09-02 |
| 11923181 | Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing | HyungChul Moon | 2024-03-05 |
| 11823876 | Substrate processing apparatus | Changmin Lee | 2023-11-21 |
| 11646184 | Substrate processing apparatus | HyungChul Moon | 2023-05-09 |
| 11443926 | Substrate processing apparatus | JuIll Lee, HaSeok Jang | 2022-09-13 |
| 11430640 | Substrate processing apparatus | JuIll Lee, HaSeok Jang | 2022-08-30 |
| 11171025 | Substrate processing device | — | 2021-11-09 |