Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923181 | Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing | WonKi Jeong | 2024-03-05 |
| 11840761 | Substrate processing apparatus | — | 2023-12-12 |
| 11646184 | Substrate processing apparatus | WonKi Jeong | 2023-05-09 |
| 10692702 | Apparatus for treating substrate | Hyung Joon Kim | 2020-06-23 |
| 10304664 | Systems and methods of treating a substrate | Hyung Joon Kim | 2019-05-28 |