Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12173400 | Substrate processing device | — | 2024-12-24 |
| 12107000 | Substrate support assembly and substrate processing device including the same | JuIll Lee, GunYong Park | 2024-10-01 |
| 11767589 | Substrate processing device | — | 2023-09-26 |
| 11664267 | Substrate support assembly and substrate processing device including the same | Julll Lee, GunYong Park | 2023-05-30 |
| 11664199 | Substrate processing apparatus and substrate processing method | DaeYoun Kim, JulIl Lee, Changmin Lee | 2023-05-30 |
| 11401605 | Substrate processing apparatus | JuIll Lee | 2022-08-02 |
| 11251068 | Substrate processing apparatus and substrate processing method | DaeYoun Kim, Julll Lee, Changmin Lee | 2022-02-15 |
| 9418880 | Apparatuses and methods for treating substrate | — | 2016-08-16 |