Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664267 | Substrate support assembly and substrate processing device including the same | JaeMin Roh, GunYong Park | 2023-05-30 |
| 11251068 | Substrate processing apparatus and substrate processing method | JaeMin Roh, DaeYoun Kim, Changmin Lee | 2022-02-15 |
| D876504 | Exhaust flow control ring for semiconductor deposition apparatus | Sung Hoon Jun, Dong Rak Jung, Seung Wook Kim | 2020-02-25 |