Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12107000 | Substrate support assembly and substrate processing device including the same | JaeMin Roh, JuIll Lee | 2024-10-01 |
| 11664267 | Substrate support assembly and substrate processing device including the same | JaeMin Roh, Julll Lee | 2023-05-30 |