Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11993843 | Substrate processing apparatus | Seung Wook Kim, JuIll Lee, Won Ki Jeong, Hong Hyun Kim | 2024-05-28 |
| 11205585 | Substrate processing apparatus and method of operating the same | Won Ki Jeong, Sung Hoon Jun | 2021-12-21 |
| D876504 | Exhaust flow control ring for semiconductor deposition apparatus | Julll Lee, Sung Hoon Jun, Seung Wook Kim | 2020-02-25 |
| 8778083 | Lateral-flow deposition apparatus and method of depositing film by using the apparatus | Ki Jong Kim, Yong Min Yoo, Jung Soo Kim, Hyung Sang Park, Seung Woo Choi +1 more | 2014-07-15 |
| 8747948 | Deposition apparatus | Hyung Sang Park, Seung Woo Choi, Jong Su Kim, Jeong Ho Lee, Chun Soo Lee | 2014-06-10 |
| 8273178 | Thin film deposition apparatus and method of maintaining the same | Se Yong Kim, Woo Chan Kim | 2012-09-25 |
| 8092606 | Deposition apparatus | Hyung Sang Park, Seung Woo Choi, Jong Su Kim, Jeong Ho Lee, Chun Soo Lee | 2012-01-10 |
| D614593 | Substrate support for a semiconductor deposition apparatus | Jeong Ho Lee, Sang Jin Jeong | 2010-04-27 |