Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12270118 | Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method | Seung Woo Choi, Dong Seok Kang, Jong Won Shon | 2025-04-08 |
| 12188121 | Method of depositing silicon oxide films | Tae Ho Yoon, Hyung Sang Park | 2025-01-07 |
| 11965262 | Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method | Jong Won Shon, Seung Woo Choi, Dong Seok Kang | 2024-04-23 |
| 11261523 | Method of depositing silicon oxide films | Tae Ho Yoon, Hyung Sang Park | 2022-03-01 |
| 11195845 | Substrate processing method and device manufactured by the same | Tae Hee Yoo, Yoon Ki Min | 2021-12-07 |
| 10876218 | Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method | Jong Won Shon, Seung Woo Choi, Dong Seok Kang | 2020-12-29 |
| 10847529 | Substrate processing method and device manufactured by the same | Tae Hee Yoo, Yoon Ki Min | 2020-11-24 |
| 10644025 | Method of processing a substrate and a device manufactured by using the method | Seung Ju Chun, Jong Wan Choi, Young Jae Kim, Sun Ja Kim, Wan Gyu Lim +3 more | 2020-05-05 |
| 10622375 | Method of processing a substrate and a device manufactured by using the method | Seung Ju Chun, Jong Wan Choi, Young Jae Kim, Sun Ja Kim, Wan Gyu Lim +3 more | 2020-04-14 |
| 10504901 | Substrate processing method and device manufactured using the same | Tae Hee Yoo, Yoon Ki Min | 2019-12-10 |
| 10438965 | Semiconductor device and manufacturing method thereof | Young Jae Kim, Seung Woo Choi | 2019-10-08 |
| 10395921 | Method of forming thin film | Young-Hoon Kim, Dae Youn Kim, Seung Woo Choi, Hyung Wook NOH, Hak Joo Lee | 2019-08-27 |
| 10381226 | Method of processing substrate | Jong Wan Choi, Young Jae Kim, Sun Ja Kim, Wan Gyu Lim | 2019-08-13 |
| 10249577 | Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method | Choong-Man Lee, Young Jae Kim, Seung Ju Chun, Sun Ja Kim | 2019-04-02 |
| 10134757 | Method of processing a substrate and a device manufactured by using the method | Seung Ju Chun, Jong Wan Choi, Young Jae Kim, Sun Ja Kim, Wan Gyu Lim +3 more | 2018-11-20 |
| 10032792 | Semiconductor device and manufacturing method thereof | Young Jae Kim, Seung Woo Choi | 2018-07-24 |
| 9899405 | Semiconductor device and manufacturing method thereof | Young Jae Kim, Seung Woo Choi | 2018-02-20 |
| 9702041 | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus | Seok-Jun Won, Dae Youn Kim, Young-Hoon Kim, Dae-Jin Kwon, Weon-Hong Kim | 2017-07-11 |
| 9406502 | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus | Seok-Jun Won, Dae Youn Kim, Young-Hoon Kim, Dae-Jin Kwon, Weon-Hong Kim | 2016-08-02 |
| 9330899 | Method of depositing thin film | In-Soo Jung, Eun-Kee Hong, Seung Woo Choi, Dong Seok Kang, Pei-Chung Hsiao | 2016-05-03 |
| 9145609 | Lateral flow atomic layer deposition device | Young Seok Choi, Dae Youn Kim, Seung Woo Choi, Jung Soo Kim | 2015-09-29 |
| 9029244 | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus | Seok-Jun Won, Dae Youn Kim, Young-Hoon Kim, Dae-Jin Kwon, Weon-Hong Kim | 2015-05-12 |
| 8778083 | Lateral-flow deposition apparatus and method of depositing film by using the apparatus | Ki Jong Kim, Jung Soo Kim, Hyung Sang Park, Seung Woo Choi, Jeong Ho Lee +1 more | 2014-07-15 |
| 8076242 | Methods of forming an amorphous silicon thin film | Jong Su Kim, Hyung Sang Park, Hak Yong Kwon, Tae Ho Yoon | 2011-12-13 |
| 7708969 | Method of forming metal oxide | Seok-Jun Won, Min-Woo Song, Dae Youn Kim, Young-Hoon Kim, Weon-Hong Kim +2 more | 2010-05-04 |