Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388509 | Formation of epitaxial layers via dislocation filtering | Joe Margetis | 2019-08-20 |
| 10373850 | Pre-clean chamber and process with substrate tray for changing substrate temperature | Eric Hill | 2019-08-06 |
| 10262859 | Process for forming a film on a substrate using multi-port injection assemblies | Joe Margetis, Gregory Bartlett, Nupur Bhargava | 2019-04-16 |
| 10053774 | Reactor system for sublimation of pre-clean byproducts and method thereof | Eric Hill | 2018-08-21 |
| 9905420 | Methods of forming silicon germanium tin films and structures and devices including the films | Joe Margetis | 2018-02-27 |
| 9890456 | Method and system for in situ formation of gas-phase compounds | Eric Hill, Jereld Lee Winkler | 2018-02-13 |
| 9892913 | Radial and thickness control via biased multi-port injection settings | Joe Margetis, Gregory Bartlett, Nupur Bhargava | 2018-02-13 |
| 9793115 | Structures and devices including germanium-tin films and methods of forming same | — | 2017-10-17 |
| 9647114 | Methods of forming highly p-type doped germanium tin films and structures and devices including the films | Joe Margetis | 2017-05-09 |
| 9514927 | Plasma pre-clean module and process | Matthew G. Goodman, Robert Vyne, Eric Hill | 2016-12-06 |
| 9474163 | Germanium oxide pre-clean module and process | Matthew G. Goodman | 2016-10-18 |
| 9396934 | Methods of forming films including germanium tin and structures and devices including the films | — | 2016-07-19 |
| 9299557 | Plasma pre-clean module and process | Matthew G. Goodman, Robert Vyne, Eric Hill | 2016-03-29 |
| 9099423 | Doped semiconductor films and processing | Keith Doran Weeks, Matthew G. Goodman, Sandeep Mehta | 2015-08-04 |
| 8921207 | Tin precursors for vapor deposition and deposition processes | — | 2014-12-30 |
| 8821635 | Method for growing Si-Ge semiconductor materials and devices on substrates | John Kouvetakis, Ignatius S. T. Tsong, Changwu Hu | 2014-09-02 |
| 8568681 | Hydride compounds with silicon and germanium core atoms and method of synthesizing same | John Kouvetakis, Cole J. Ritter, III | 2013-10-29 |
| 7981392 | Hydride compounds with silicon and germanium core atoms and method of synthesizing same | John Kouvetakis, Cole J. Ritter, III | 2011-07-19 |
| 7781356 | Epitaxial growth of group III nitrides on silicon substrates via a reflective lattice-matched zirconium diboride buffer layer | John Kouvetakis, Ignatius S. T. Tsong, Radek Roucka | 2010-08-24 |
| 7598513 | SixSnyGe1-x-y and related alloy heterostructures based on Si, Ge and Sn | John Kouvetakis, Matthew Bauer | 2009-10-06 |
| 7589003 | GeSn alloys and ordered phases with direct tunable bandgaps grown directly on silicon | John Kouvetakis, Matthew Bauer, Jose Menendez, Chang Wu Hu, Ignatius S. T. Tsong | 2009-09-15 |
| 7582891 | Materials and optical devices based on group IV quantum wells grown on Si-Ge-Sn buffered silicon | John Kouvetakis, Jose Menendez, Ling Liao, Dean Samara-Rubio | 2009-09-01 |
| 7374738 | Superhard dielectric compounds and methods of preparation | John Kouvetakis, Ignatius S. T. Tsong, Levi Torrison | 2008-05-20 |
| 7238596 | Method for preparing Ge1-x-ySnxEy (E=P, As, Sb) semiconductors and related Si-Ge-Sn-E and Si-Ge-E analogs | John Kouvetakis, Matthew Bauer, Candi S. Cook | 2007-07-03 |
| 6911084 | Low temperature epitaxial growth of quaternary wide bandgap semiconductors | John Kouvetakis, Ignatius S. T. Tsong, Radek Roucka | 2005-06-28 |