Issued Patents All Time
Showing 76–79 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759344 | Method for forming low dielectric constant interlayer insulation film | Nobuo Matsuki, Yoshinori Morisada, Manabu Kato | 2004-07-06 |
| 6383900 | Method and apparatus for forming polycrystal silicon film | Akira Shimizu, Kunitoshi Nanba | 2002-05-07 |
| 6242278 | Method for forming polycrystal silicon film for semiconductor elements | Akira Shimizu, Satoshi Takahashi | 2001-06-05 |
| 6211077 | Method for forming polycrystal silicon film for semiconductor elements | Akira Shimizu, Yukihiro Mori | 2001-04-03 |