Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7549141 | Photomask, photomask manufacturing method, and photomask processing device | Hiroshi Kojima, Kouji Otsuka | 2009-06-16 |
| 7527695 | Apparatus and method for cleaning substrate | — | 2009-05-05 |
| 7514382 | Synthetic quartz glass for optical member and its production method | Noriyuki Agata | 2009-04-07 |
| 7504185 | Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography | David Krick, Hsing Chign Ma | 2009-03-17 |
| 7368403 | Synthetic quartz glass for optical member, projection exposure apparatus and projection exposure method | Noriyuki Agata | 2008-05-06 |
| 7230695 | Defect repair device and defect repair method | Toshiyuki Uno | 2007-06-12 |
| 7022633 | Synthetic quartz glass and process for producing it | Shinya Kikugawa, Noriaki Shimodaira, Akio Masui, Shuhei Yoshizawa | 2006-04-04 |
| 6749053 | Bill handling machine | — | 2004-06-15 |
| 6611317 | Exposure apparatus, semiconductor device, and photomask | Tohru Ogawa, Hideo Hosono, Shinya Kikugawa, Akio Masui, Noriaki Shimodaira +1 more | 2003-08-26 |
| 6576578 | Synthetic quartz glass and method for preparing the same | Shinya Kikugawa, Akio Masui, Noriaki Shimodaira, Shuhei Yoshizawa | 2003-06-10 |
| 6544914 | Synthetic quartz glass for optical member, process for producing the same, and method of using the same | Shinya Kikugawa, Akio Masui, Noriaki Shimodaira, Shuhei Yoshizawa | 2003-04-08 |
| 6499317 | Synthetic quartz glass and method for production thereof | Shinya Kikugawa, Noriaki Shimodaira, Akio Masui, Shuhei Yoshizawa | 2002-12-31 |
| 6475575 | Pellicle and method for manufacture thereof | Shinya Kikugawa, Hitoshi Mishiro, Hiroshi Arishima, Kaname Okada, Katsuhiro Matsumoto | 2002-11-05 |
| 4919207 | Method for drawing up special crude oil | Masayuki Moriwaki, Masato Kaneko | 1990-04-24 |
| 4756368 | Method for drawing up special crude oil | Masayuki Moriwaki, Masato Kaneko, Hisazi Matsui | 1988-07-12 |