Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7934391 | Synthetic quartz glass body, process for producing the same, optical element, and optical apparatus | Chikaya Tamitsuji, Kunio Watanabe, Daisuke Kobayashi | 2011-05-03 |
| 6829084 | Ultraviolet and vacuum ultraviolet antireflection substrate | Satoru Takaki, Shinya Kikugawa | 2004-12-07 |
| 6795170 | Structure for attaching a pellicle to a photo-mask | Hitoshi Mishiro, Shinya Kikugawa, Takayuki Kawahara, Morio Terakado | 2004-09-21 |
| 6744562 | Pellicle | Shinya Kikugawa | 2004-06-01 |
| 6628456 | Ultraviolet and vacuum ultraviolet antireflection substrate | Satoru Takaki, Shinya Kikugawa | 2003-09-30 |
| 6475575 | Pellicle and method for manufacture thereof | Yoshiaki Ikuta, Shinya Kikugawa, Hitoshi Mishiro, Hiroshi Arishima, Katsuhiro Matsumoto | 2002-11-05 |