Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824954 | Sulfonyloxime compound, and radiation sensitive acid generator, positive type radiation sensitive resin composition and negative type radiation sensitive resin composition using same | Eiji Yoneda, Tatsuya Toneri, Tsutomu Shimokawa | 2004-11-30 |
| 6770780 | Vinylphenylpropionic acid derivatives, production process therefor, polymer thereof and radiation sensitive resin composition | Yasuaki Mutsuga, Shigeo Shimizu, Tsutomu Shimokawa, Atsushi Kumano | 2004-08-03 |
| 6517992 | N-sulfonyloxyimide compound and radiation-sensitive resin composition using the same | Eiichi Kobayashi, Masaaki Miyaji, Jun Numata, Tsutomu Shimokawa | 2003-02-11 |
| 6468714 | Negative radiation-sensitive resin composition | Toshiyuki Kai, Shirou Kusumoto, Yoshihisa Ohta | 2002-10-22 |
| 6143460 | Diazodisulfone compound and radiation-sensitive resin composition | Eiichi Kobayashi, Ken Yokoyama, Shin-ichiro Iwanaga | 2000-11-07 |
| 5952150 | Radiation sensitive resin composition | Yoshihisa Ohta, Takayoshi Tanabe, Shin-ichiro Iwanaga | 1999-09-14 |