Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7655577 | Method of forming silicon-containing insulation film having low dielectric constant and low film stress | Yasuyoshi Hyodo, Nobuo Matsuki, Masashi Yamaguchi, Atsuki Fukazawa, Naoki Ohara | 2010-02-02 |
| 7148154 | Method of forming silicon-containing insulation film having low dielectric constant and low film stress | Yasuyoshi Hyodo, Nobuo Matsuki, Masashi Yamaguchi, Atsuki Fukazawa, Naoki Ohara | 2006-12-12 |
| 6756235 | Metal oxide film formation method and apparatus | Hiroshi Shinriki, Takashi Magara | 2004-06-29 |
| 6485564 | Thin film forming method | Hiroshi Shinriki, Takashi Magara | 2002-11-26 |
| 6428850 | Single-substrate-processing CVD method of forming film containing metal element | Hiroshi Shinriki, Masahito Sugiura | 2002-08-06 |
| 6126753 | Single-substrate-processing CVD apparatus and method | Hiroshi Shinriki, Masahito Sugiura | 2000-10-03 |