Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8580935 | Ultra-fast chromatography | Reno T. Nguyen, Ian Chappell | 2013-11-12 |
| 7879510 | Method for quartz photomask plasma etching | Ajay Kumar | 2011-02-01 |
| 7846848 | Cluster tool with integrated metrology chamber for transparent substrates | Richard Lewington, Corey J. Collard, Khiem K. Nguyen | 2010-12-07 |
| 7786019 | Multi-step photomask etching with chlorine for uniformity control | Renee Koch | 2010-08-31 |
| 7635546 | Phase shifting photomask and a method of fabricating thereof | Xiaoyi Chen, Michael N. Grimbergen, Ajay Kumar | 2009-12-22 |